Abstract
AbstractThis paper reports on the fabrication of novel all-polymer microbridge electrostatic actuators based on conductive polymers and using surface micromachining on glass substrates. The electromechanical properties of the microbridges are studied using electrostatic actuation and optical and electrical detection. The pull-in phenomena and a dependence of the bridge deflection with the square of the applied voltage are observed. Compared to the silicon-based microbridges, the polymer structures present higher deflection amplitude for the same applied electrical force. The resonance frequency of the polymer bridges occurs in the MHz range and with quality factors of the order of 100 when measured in vacuum. The mechanical properties of the polymer device are affected by the residual stresses.
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