Abstract
All-polymer microbridge electrostatic actuators based on a blended conductive polymer are fabricated using surface micromachining on glass substrates. A fabrication process is developed that allows the preservation of the electrical conductivity of the polymer structural layer and the suspension of the polymer microbridges. The electromechanical properties of the microbridges are studied using electrostatic actuation and optical and electrical detections. The pull-in phenomena and a dependence of the bridge deflection with the square of the applied voltage are observed. Compared to the silicon-based microbridges, the polymer structures present higher deflection amplitude for the same applied electrical force. The resonance frequency of the polymer bridges occurs in the megahertz range with quality factors of the order of 100 when measured in vacuum. The mechanical properties of the polymer device are affected by residual stress.
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