Abstract
Fabrication and Electromechanical Characterization of Silicon Nanomechanical Membrane Flexure MEMS Sensor for Gas Sensing Applications
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
https://doi.org/10.1109/jsen.2024.3351198
Journal: IEEE Sensors Journal | Publication Date: Mar 1, 2024 |
Citations: 1 |
Fabrication and Electromechanical Characterization of Silicon Nanomechanical Membrane Flexure MEMS Sensor for Gas Sensing Applications
Join us for a 30 min session where you can share your feedback and ask us any queries you have