Abstract

We have proposed gate-all-around Silicon nanowire MOSFET (SNWFET) on bulk Si as an ultimate transistor. Well controlled processes are used to achieve gate length (L <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">G</sub> ) of sub-10nm and narrow nanowire widths. Excellent performance with reasonable V <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">TH</sub> and short channel immunity are achieved owing to thin nanowire channel, self-aligned gate, and GAA structure. Transistor performance with gate length of 10nm has been demonstrated and nanowire size (D <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">NW</sub> ) dependency of various electrical characteristics has been investigated. Random telegraph noise (RTN) in SNWFET is studied as well.

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