Abstract

6T-SRAM cell design with gate-all-around (GAA) silicon nanowire (NW) MOSFETs is investigated via three-dimensional TCAD simulations and compact analytical modeling. A rectangular NW channel design allows the transistor width to be adjusted with reduced impact on short-channel effects. This in turn provides a means for tuning the cell ratios to optimize the tradeoff between static noise margin and writeability with optimal cell layout area efficiency.

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