Abstract
In this article, tin oxide (SnO2) doped tungsten oxide (WO3) was deposited on Si substrate as an effective NO2 gas sensor via pulsed laser deposition (PLD) considering different content of SnO2 to WO3. Further, the correlation between the investigated microstructural and sensing characteristics was thoroughly elaborated. Specifically, an increment in the SnO2 content from 10:90 to 30:70 % resulted in smaller nanoparticle diameter (53.9–45.9 nm); the attained energy bandgap exhibited an inverse profile along considerably high electrical resistance alteration. In detail, the gas response increased from 30.7 to 39.5 for the addressed SnO2 to WO3 contents, respectively. The examined operating temperature indicated a negative correlation along the evaluated sensing profile with R2 value of −0.98. The time-resolved characteristics of the optimum gas sensor (@30:70) revealed rise/fall time of 6 and 13 sec. at 150 °C, respectively; this was found to be pronouncedly higher at higher operating temperatures.
Published Version
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