Abstract
A novel metal-induced lateral crystallization (MILC) technology has been applied to the formation of improved polycrystalline silicon (poly-Si) piezo-resistors. Nickel has been used for the MILC of amorphous silicon formed by low-pressure chemical vapor deposition. Independent of the physical layout of the resistors, the MILC poly-Si is found to consist of elongated grains with grain lengths comparable to the physical lengths of the resistors. Surface micro-machined micro-channels with integrated pressure sensors using both MILC and conventional low-pressure chemical vapor deposited (LPCVD) poly-Si piezo-resistors have been fabricated and characterized. Compared to the sensors with the LPCVD piezo-resistors, those with the MILC piezo-resistors show 40% higher pressure sensitivity as well as lower temperature-induced drift in both the zero-pressure offset and the pressure sensitivity. Stability in terms of small temporal drift in the zero point offset has been obtained for the MILC pressure sensors.
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