Abstract
Using a a-axis-oriented epitaxial (Bi3.25Nd0.65Eu0.10)Ti3O12 (BNEuT) thin films with a microplate-like shape as a ferroelectric pillar material, micropillar-type CoFe2O4 (CFO)/BNEuT(h00)/Nb:TiO2(101) composite multiferroic films were fabricated by metal organic chemical vapor deposition. The deposition time was varied from 90–150 min to examine its effect on the structural, ferroelectric, and ferromagnetic characteristics of the films. All the films exhibit single-phase cobalt ferrite with a cubic inverse-spinel structure. The deposited CFO films have a similar columnar structure with a comparatively good step coverage of 37%–66%. The room-temperature magnetization−magnetic field hysteresis loop of the films showed a clear ferromagnetic hysteresis loop, and coercivity decreased from 1.1 to 0.9 kOe with increasing the deposition time. The room-temperature polarization−electric field hysteresis loop of the films showed a ferroelectric hysteresis loop, and the effect of the leakage current was the smallest for a deposition time of 120 min.
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