Abstract
This work aimed to manufacture a highly sensitive hydrogen gas sensor based on Fe2O3:ZnO thin film. The Fe2O3:ZnO based sputtering target was synthesized by a solid-state synthesis method. Gas-sensitive thin films were deposited onto the alumina substrate by the high-frequency (RF) magnetron sputtering method. The thickness of the sensing film was measured and the morphology of the sensing layers was studied. The Fe2O3:ZnO sensor showed the highest hydrogen gas response at 100 ᵒC and the operating temperature of 150 ᵒC was selected as the optimum working temperature. The sensor showed sensitivity even to extremely low concentrations of hydrogen (100 ppm), where the response was 4.6. The sensing parameters of the fabricated sensor confirm that the Fe2O3:ZnO material may become an excellent nanostructure for the detection of low concentrations of hydrogen.
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