Abstract
A process scheme for the fabrication of scanning near-field optical and force microscopy cantilever sensors with coaxial tips is presented. A hollow fourfold pyramidal tip is used, coated from both sides by 100 nm aluminium. Focused Ion Beam milling is performed to structure the tips. First measurements on a model system demonstrate the performance of these sensors.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Paper version not known
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
