Abstract
This study investigates the design and fabrication of magnetic microsensors using the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process. The magnetic sensor is composed of springs and interdigitated electrodes, and it is actuated by the Lorentz force. The finite element method (FEM) software CoventorWare is adopted to simulate the displacement and capacitance of the magnetic sensor. A post-CMOS process is utilized to release the suspended structure. The post-process uses an anisotropic dry etching to etch the silicon dioxide layer and an isotropic dry etching to remove the silicon substrate. When a magnetic field is applied to the magnetic sensor, it generates a change in capacitance. A sensing circuit is employed to convert the capacitance variation of the sensor into the output voltage. The experimental results show that the output voltage of the magnetic microsensor varies from 0.05 to 1.94 V in the magnetic field range of 5–200 mT.
Highlights
Magnetic sensors are important devices for diverse applications in industrial equipment and electronic instruments
Several traditional magnetic sensors were miniaturized as magnetic microsensors using microelectromechanical system (MEMS) technology
Du et al [3] proposed a piezoresistive magnetic field sensor with a silicon bridge structure manufactured by MEMS technology
Summary
Magnetic sensors are important devices for diverse applications in industrial equipment and electronic instruments. Several traditional magnetic sensors were miniaturized as magnetic microsensors using microelectromechanical system (MEMS) technology. Du et al [3] proposed a piezoresistive magnetic field sensor with a silicon bridge structure manufactured by MEMS technology. Marauska et al [6] developed a MEMS magnetic sensor based on magnetoelectric composites with vacuum encapsulation using wafer-level packaging technology. Li et al [8] used MEMS technology to fabricate a three-axis Lorentz-force magnetic sensor. The device had a noise resolution of 87 nT/ Hz and a corresponding angular resolution of 0.7 / Hz. Tapia et al [12] presented a resonant magnetic field sensor fabricated using MEMS technology for detecting the spiking activity of neurons and muscle cells. The sensor utilized capacitive driving and electromagnetic induction sensing method to detect the external magnetic field. A sensing circuit converts the sensor capacitance into the output voltage
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