Abstract
This study presents the fabrication and characterization of a micromechanical tunable in-plane resonator. The resonator is manufactured using the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process. The resonator is made of aluminum, and the sacrificial layer is silicon dioxide. The post-process involves only one maskless etching step using an etchant to remove the sacrificial layer. The resonator includes three parts: a driving part to provide a driving force, a sensing part that is used to detect a change in capacitance when the resonator is vibrating, and a tuning part that changes the resonant frequency of the resonator. The main advantages of the tunable resonator are a low driving voltage and compatibility with the CMOS process. The resonant frequency of the resonator can be changed upon applying a dc voltage to the tuning part. To reduce the driving voltage, the driving part is designed as comb-finger rows. Experimental results show that the resonator has a resonant frequency of about 183 kHz and a driving voltage of 10 V; the resonant frequency increases 14 kHz when a tuning voltage of 30 V is applied. The resonator has a maximum frequency–tuning ratio of 7.6%.
Highlights
With the advances in science and technology, industrial communication has become inseparable from daily life
Micromechanical resonators can be used as filters for wireless communication applications [1,2]
The measured result showed that the resonant frequency of the resonator without the tuning voltage was 183 kHz
Summary
With the advances in science and technology, industrial communication has become inseparable from daily life. According to a report from the National Communications Commission in Taiwan, the penetration rate of the mobile phone in Taiwan was only 6.9% in 1997, and grew to 105.8% in 2007. As the size of these devices continues to decrease, a filter is needed to control the quality of communication. Filters have become an important electronic component within the electronic industry in order to keep pace with the developments that are being made rapidly. Micromechanical resonators can be used as filters for wireless communication applications [1,2]. The main advantage of micromechanical resonators is high quality factor (Q-factor)
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