Abstract
Reference structures are urgently required to characterize the performance of scanning probe microscopes for the quantitative measurement of micro-/nano-scale roughness. In this paper, preliminary areal roughness specimens are fabricated by electron beam lithography (EBL) and direct laser writing (DLW). The geometric topography and statistical quantities of the surface structures are specially designed. Precise registration between the design template and the measured data has been carried out to evaluate the fabrication quality. Two matching algorithms, the iterative closest point method and the Levenberg–Marquardt method, are compared. Results imply that the latter method prevails against the former one with improved accuracy and efficiency. It is demonstrated that the typical root-mean-square residuals of the EBL and DLW fabricated surfaces are approximately 43.5 and 195.3 nm, respectively. The spectral properties of the fabricated structures are also analyzed. These areal roughness specimens have a potential for validating scanning probe microscopes and other nano-measurement instruments for areal roughness measurements.
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