Abstract
This paper reports on the characteristics of perovskite Ba(Zr 0.1,Ti 0.9)O 3 (BZT) ferroelectric films on ITO glass substrate. The deposition rate and surface roughness of thin films were measured and calculated to be about 3.4 nm/min and 4.85 nm, respectively, from the SEM cross-sectional and AFM images. Further, the dielectric constant and leakage current density were about 130 and 5×10 −8 A/cm 2, as the substrate temperature was 550 °C.
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