Abstract
Titanium-doped Diamond-like carbon (Ti-DLC) has been previously used in photodetectors. However, these photodetectors suffer from large dark currents and long response times, limiting their practicality. In this study, we propose a Ti-DLC/Au/Si Schottky junction photodetector. We effectively suppressed the dark current by incorporating a thin layer of gold while enhancing the light current. The results showed the device shows the optimal performance when the gold is at 3 nm and the Ti-DLC thickness is 68 nm, the specific detectivity of the device reaches 1.8 × 1011 Jones and an optical-to-dark ratio exceeding 105 at zero bias voltage, and the response speed is in the range of tens of microseconds, significantly improving its performance. With its ability to suppress dark current, this Schottky junction photodetector holds excellent potential for various applications in the market.
Published Version
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