Abstract
FAB-SIMS (Fast Atom Bombardment Secondary Ion Mass Spectrometry) and LIMS (Laser Ionization Mass Spectrometry) have been explained.FAB-SIMS is a kind of SIMS in which a fast atom beam is used for the primary beam for sample bombardment. It is useful for insulator samples as sample surface charging caused by charge of the primary beam does not occur. The relative intensity for various elements by FAB-SIMS is similar to that of normal SIMS.LIMS is an analytical device in which pulsively generated ions by pulsed laser radiation on solid state samples are generated from samples through thermal ionization or through LTE process of microplasma produced on laser-heated sample sufaces. LIMS has extremely high sensitivity of 10-1810-20gr.
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