F106 プラズマ反応器内の希薄流(オーガナイズドセッション8 : 量子・分子モデルの熱流体工学への応用)

Abstract

The flow in a plasma reactor has effects on plasma etching. It is important for the optimum design of a plasma reactor to know the gas flow in the plasma reactor. We examined the three-demensional rarefied flows in the reactor using DSMC method.Based on these DSMC data, the minimal height of the reactor, for which the gas fkow probably has no effect on etch rate distribution, is determined.