Abstract
An extrinsic fiber Fabry-Perot interferometric acoustic sensor based on a large-area silver diaphragm is proposed. The thickness and diameter of the silver diaphragm are 160nm and 2.4mm, respectively. The flatness of the diaphragm is <14μm. Experimental results showed that the sensor has the acoustic sensitivity of −124.8dB re 1V/μPa with a high linear pressure response in the range of 2.5–268mPa. The mechanical sensitivity of the diaphragm is 28.57nm/Pa. The sensor exhibits a flat frequency response in the range of 0.2–2.8kHz. The noise equivalent acoustic signal level is 83μPa/Hz1/2 at 1kHz. The sensor is expected to be used for weak acoustic sensing.
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