Abstract
Free standing, nanoporous alumina templates were fabricated as transmissionmasks from aluminium using a two-step anodization process followed by acidetching. The resulting membrane comprises self-ordered, periodic arrays ofnon-connecting circular channels which can be prepared with pore diameters<100 nm and with minimal occlusion. Aspect ratios greater than 300:1 were measured directlyusing electron transmission and the channels were shown to be highly aligned(angular) over membrane thicknesses of tens of microns. Also evident is some localorder associated with both azimuthal and angular domain structure giving rise tolocal channel tilt which has not previously been reported. Transmission electronmicroscopy has been shown to be an important characterization tool for thesenanomasks as the channels are transparent to electrons, providing a means of directlymeasuring their thickness and aspect ratio. Expressions for determining theirthickness and aspect ratio are also presented and evaluated in this work. Thesemembranes are well suited for use as nanotemplates in transmission lithographyapplications including ion implantation and ion or electron beam collimation.
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