Abstract
The paper demonstrate a formation of thin film titania (TiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> ) with dense array of nanopoles and nanopores. The heights of poles and pores are 180 nm and 130 nm, respectively. In order to get titania nanopoles and nanopores, the authors make a nanoporous alumina (A1 <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> O <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> ) template through a two-step anodization process, which is essential for the uniform and densified nanopores on aluminum surface. Nano-structured titania films were spin-coated under sol-gel state. The spin-coated titania films were then uniformly patterned by nanoimprinting lithography technique with textured PMMA mold or nanoporous alumina template. These fabricated titania films are very useful for solar cells, photocatalytic and sensing applications wherein nano-structuring of surface with controlled dimensions are vital.
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