Extraction of isotropic and anisotropic components for optical surface micro-metrology based on the two-dimensional power spectral density analysis

Abstract

Extraction of surface characteristics is essential during surface processing and optical inspections. In this work, we propose a new extraction method by dividing the global feature within multiple directions into isotropic and anisotropic components and combining noise filtration, two-dimensional component extraction, and fast reconstruction. The mathematical descriptions of global and local features were derived. The noise by holes, scratches, and finite sampling points was restrained by Bearing Ratio analysis, Hough transform, and Welch window operation. The isotropic and anisotropic surface components were extracted in the two-dimensional power spectral density domain, reconstructed in the two-dimensional Fourier domain, and inversed in Cartesian coordinates. Five surfaces with anisotropic structural characteristics ranging from zero to two dimensions were analyzed. The general applicability was proved according to the consistency between surface processing methods and extracted results. A chemical mechanical polishing experiment was designed and accomplished to verify the sensitivity of the extraction method. The subtle variation in surface morphology was captured on the reconstructed surfaces near the polishing end-point, confirming its detectability on weak anisotropic components. This process-oriented surface extraction method can achieve qualified results without transcendental knowledge of surface conditions and offers openness to various surface evaluation criteria by statistical roughness indicators, which supports surface inspection for multiple surface processing techniques.