Extraction of Defect Density and Size Distributions from Wafer Sort Test Results

J.E Nelson,R.D Blanton,J.G Brown,W Maly,N Patil,R Desineni,T Zanon

doi:10.1109/date.2006.243807

Extraction of Defect Density and Size Distributions from Wafer Sort Test Results

J.E Nelson, R.D Blanton + Show 5 more

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https://doi.org/10.1109/date.2006.243807

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Publication Date: Jan 1, 2006

Citations: 11

Affiliation: Carnegie Mellon University

#Defect Size Distributions #Defect Density Distributions #Specialized Test Structures #Defect Size #Defect Density #Metal Layers #Density Distributions #Key Parameters #Size Distributions #Test Results

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Defect density and defect size distributions (DDSDs) are key parameters used in IC yield loss predictions. Traditionally, memories and specialized test structures have been used to estimate these distributions. In this paper, we propose a strategy to accurately estimate DDSDs for shorts in metal layers using production IC test results.

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Extraction of Defect Density and Size Distributions from Wafer Sort Test Results