Extracted ion current density in close-coupling multi-antenna type radio frequency driven ion source: CC-MATIS

Abstract

Positive ions are extracted by using a small extractor from the Close-Coupling Multi-Antenna Type radio frequency driven Ion Source. Two types of RF antenna are used. The maximum extracted ion current density reaches 0.106 A/cm(2). The RF net power efficiency of the extracted ion current density under standard condition is 11.6 mA/cm(2)/kW. The efficiency corresponds to the level of previous beam experiments on elementary designs of multi-antenna sources, and also to the efficiency level of a plasma driven by a filament in the same chamber. The multi-antenna type RF plasma source is promising for all metal high density ion sources in a large volume chamber.