Abstract
An inductively coupled rf plasma ion source has been developed for neutron generators. The ion source configuration has been optimized for low pressure operation. Both 13.56 and 27.12MHz rf powers have been used to generate hydrogen plasma. Experimental results show that 27.12MHz operation is more efficient than 13.56MHz in a low pressure region. The ion source can also be operated in pulsed mode. Current density higher than 30mA∕cm2 can be extracted from a 2-mm-diam aperture at 2kW rf input power and 3mTorr operation pressure.
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