Extension of the probe-tip error evaluation for areal surface roughness measurements using metrological AFM

Abstract

Recently, there have been increasing demands not only for the conventional profile surface roughness measurements using atomic force microscopes (AFM) but also for areal surface roughness measurements. In this study, a technique using Sal, one of the areal surface roughness parameters, instead of RSm, one of the profile roughness parameters, is proposed in order to extend the conventional method of profile roughness measurements specified in ISO 19606:2017 to areal roughness measurements. Areal surface roughness measurements performed using a metrological AFM and evaluation of their expanded uncertainties are also reported.