Abstract

Extended short-wave infrared (SWIR) avalanche photodiodes based on III–V quaternary alloys were grown on GaSb. An InGaAsSb absorber allowed for cut-off wavelengths of 2.2 μm and 2.75 μm, at 77 K and 300 K, respectively. A multiplication layer of AlGaAsSb with Al = 0.9 mole fraction was used, a material recently characterized by our group, allowing for a breakdown voltage of less than 15 V. Linear and 2D arrays were fabricated using BCl3 dry and HF wet-chemical etching, and dielectric passivation layers were tested. These results indicate that extended SWIR single photon detectors can be developed.

Highlights

  • That can be grown on it are technologically significant for extended wavelength infrared detectors: absorbers for the short and mid-wave infrared (SWIR and MWIR) spectral bands between 1.7 and 4.2 lm are permitted by InGaAsSb and InAsSb alloys, whilst at still longer wavelengths, either the InAs/GaSb or InAs/InAsSb strained layer superlattices (SLSs) material systems9 can be used, in principle

  • Extended short-wave infrared (SWIR) avalanche photodiodes based on III–V quaternary alloys were grown on GaSb

  • That can be grown on it are technologically significant for extended wavelength infrared detectors: absorbers for the short and mid-wave infrared (SWIR and MWIR) spectral bands between 1.7 and 4.2 lm are permitted by InGaAsSb and InAsSb alloys, whilst at still longer wavelengths, either the InAs/GaSb or InAs/InAsSb SLS material systems9 can be used, in principle

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Summary

Introduction

That can be grown on it are technologically significant for extended wavelength infrared detectors: absorbers for the short and mid-wave infrared (SWIR and MWIR) spectral bands between 1.7 and 4.2 lm are permitted by InGaAsSb and InAsSb alloys, whilst at still longer wavelengths, either the InAs/GaSb or InAs/InAsSb SLS material systems9 can be used, in principle.

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