Abstract
This chapter reveals the experimental study of cluster size effect with size-selected cluster ion beam. A size-selected gas cluster ion beam (GCIB) system is developed to study the size effects of energetic large cluster ion bombardments on a solid surface for the first time. This system equipped a permanent magnet with a magnetic flux density of 1.2 T. There is a sliding detector and sample holder on a guiding rail perpendicular to the incoming cluster beam axis. By locating a sample at a certain position, particular size of cluster ion can be irradiated continuously with affordable ion current density. When the total acceleration energy of Ar-GCIB is 5keV, both amorphous and oxide thickness on silicon (Si) substrate increased with decreasing cluster size. This result showed good agreement with that obtained from molecular dynamics simulations.
Published Version
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