Abstract
This chapter reveals the experimental study of cluster size effect with size-selected cluster ion beam. A size-selected gas cluster ion beam (GCIB) system is developed to study the size effects of energetic large cluster ion bombardments on a solid surface for the first time. This system equipped a permanent magnet with a magnetic flux density of 1.2 T. There is a sliding detector and sample holder on a guiding rail perpendicular to the incoming cluster beam axis. By locating a sample at a certain position, particular size of cluster ion can be irradiated continuously with affordable ion current density. When the total acceleration energy of Ar-GCIB is 5keV, both amorphous and oxide thickness on silicon (Si) substrate increased with decreasing cluster size. This result showed good agreement with that obtained from molecular dynamics simulations.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Novel Materials Processing by Advanced Electromagnetic Energy Sources
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
