Abstract
Ethylenediamine with two −NH2 functional groups was used as a critical complexing agent in chemical mechanical polishing (CMP) slurries for a high carbon chromium GCr15 bearing steel (equivalent to AISI 52100). The polishing performance and corresponding mechanism of −NH2 functional groups were thoroughly investigated as a function of pH. It is revealed that, when polished with ethylenediamine and H2O2-based slurries, the material removal rate (MRR) and surface roughness Ra of GCr15 steel gradually decrease as pH increases. Compared with acidic pH of 4.0, at alkaline pH of 10.0, the surface film of GCr15 steel has much higher corrosion resistance and wear resistance, and thus the material removal caused by the pure corrosion and corrosion-enhanced wear are greatly inhibited, resulting in much lower MRR and Ra. Moreover, it is confirmed that a more protective composite film, consisting of more Fe3+ hydroxides/oxyhydroxides and complex compounds with −NH2 functional groups of ethylenediamine, can be formed at pH of 10.0. Additionally, the polishing performance of pure iron and a medium carbon 45 steel exhibits a similar trend as GCr15 steel. The findings suggest that acidic pH could be feasible for amine groups-based complexing agents to achieve efficient CMP of iron-based metals.
Highlights
Bearing steels, such as a high carbon chromium GCr15 bearing steel
The slurries were composed of 2 wt% colloidal silica, 0.1 M ethylenediamine sulfate, 0.01 wt% or 0.1 wt% H2O2, DI water, and with different pH ranging from 2.0 to 10.0
The slurries were composed of 2 wt% colloidal silica, 0.1 M ethylenediamine sulfate, 0.01 wt% or 0.1 wt% H2O2, DI water, and with pH of 4.0 or pH of 10.0
Summary
Bearing steels, such as a high carbon chromium GCr15 bearing steel Under the harsh working conditions, smooth surfaces of the contact elements of bearings can result in a decrease in the heat generation rate and a significant improvement of the lubrication performance between the rollers and the raceways [3, 4]. The decrease in the surface roughness of the contact elements can improve the ratio between the thickness of the lubricating film and the composite roughness, which can effectively extend the service life of bearings [5]. Ultra-smooth surfaces are required to improve the service life and operation performance of ultraprecise devices which rely on bearings and other key basic parts made of bearing steels. Traditional machining techniques, such as grinding and lapping, might not be able to meet such
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