Abstract

The usefulness of coaxial impact collision ion scattering spectroscopy (CAICISS) for surface structure analysis, especially for time-resolved analysis, is demonstrated by taking the following studies as examples: (1) the structure analysis of the Si(111)√3 × √3-Ag surface, (2) the analysis of the arrangement of S atoms at the InAs(001) surface passivated with S, and (3) the real-time monitoring of the structural changes of the Si(111)√3 × √3 -Ag surface caused by the adsorption and desorption of H.

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