Abstract

Research trends and emerging technologies were explored through the Web of Science (WoS) literature of the last decade in relation to plasma technology, especially plasma surface treatment, widely used in all industries. For this, a network analysis using country and author keywords and emerging technology search algorithms, with regard to novelty, fast growth and impact, were used. As a result, we derived 40 keywords in terms of novelty and fast growth. Additionally, with these keywords, we traced the impact based on the citation relationships. Finally, nine keywords which were analyzed to contain many new technological issues were identified by deriving the author keywords included in the relevant documents. It is expected that the new technology fields derived from this paper can contribute to establishing a preemptive R&D strategy.

Highlights

  • Plasma technology is being used as a core base technology that can promote the creation of new markets and high added value in industries such as semiconductors, displays, metals, machinery, the environment, construction, space, and aviation

  • In order to analyze the literature, we explored the quantitative trend of the papers related to plasma surface treatment and conducted network analysis using Gephi with country–author keywords network to find research areas that each country focused on

  • This paper analyzes the research trends of plasma surface treatment technology, which is widely used throughout the industry, and proposes new indicators of novelty, fast growth and impact in order to discover areas that should be focused on as emerging technologies in the future

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Summary

Introduction

Plasma technology is being used as a core base technology that can promote the creation of new markets and high added value in industries such as semiconductors, displays, metals, machinery, the environment, construction, space, and aviation. Korea has concentrated its R&D investment in the fields of materials (polymers, heat/surface treatment), electricity and electronics (semiconductor equipment, displays, etc.) and physics (plasma physics, fluid/plasma, etc.). Germany and the United States extensively studied the industrial application value of plasma technology and are expanding their investments into new industries such as the bio, environmental and agricultural industries, as well as existing industries such as automobiles, lighting, machinery, and semiconductors. The semiconductor field focuses on the plasma simulation technology required for the process and equipment utilization, while the bio field focuses on real-time plasma reaction diagnosis technology

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