Abstract
Recently, Sader [J. Appl. Phys. 84, 64 (1998)] and Green and Sader [J. Appl. Phys. 92, 6262 (2002)] developed a theory predicting thermally driven frequency responses of a microcantilever immersed in a fluid. This letter presents an experimental investigation of the temperature effects on Sader’s model using three cantilevers, with aspect ratios (AR=cantilever length/cantilever width) <4, for temperatures ranging from 10to70°C. It is shown that liquid viscosity is primarily responsible for variations in the frequency response to liquid temperature. Two cantilevers, with AR∼3.0, verify Sader’s predictions for the tested temperature range, while the third cantilever with AR∼2.0 shows gradual deviations with increasing temperature.
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