Abstract
The strain existed in different quantum well structures was analyzed by XRD. By Omega/2Theta scanning,we got the satellite peaks of different samples. Analysis of the samples of these two quantum well about the level strain, vertical strain and the Quartet distortion. By Contrasting the ternary InGaN / GaN MQW samples with the quaternary InGaN/AlInGaN MQW samples,found that the level strain, vertical strain and the quartet distortion of ternary MQW samples are higher than the InGaN / AlInGaN quantum well samples about 0.03%, 0.09 % and 0.12% respectively. Analysis shows that the InGaN/AlInGaN quantum well structure can be better to release their internal stress.
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