Abstract
In order to study the machine effects of using side-insulated electrode during the Micro electrochemical milling, a 704-silica material is firstly introduced to fabricate the side-insulation film on the micro ECM tool electrode by spin-coating technique. The 704-silica insulation film can effectively isolate the side of tool electrode with the electrolyte and eliminate the stray corrosion. With the side-insulated electrode, triangle, square and circle columns with vertical sidewalls were successfully machined in passivat sodium nitrate electrolyte. Moreover, the material removal rate is about 2.1×104 μm3/s by using a tool electrode of Ф=100 μm in diameter.
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