Abstract
Micro electrochemical machining is becoming increasingly important in the microfabrication of metal parts. In this paper, the machining characteristics of micro electrochemical milling with nanosecond pulse were studied. Firstly, a mathematical model for the localization control of micro electrochemical milling with nanosecond pulse was established. Secondly, groups of experiments were conducted on nickel-based superalloy and the effects of parameters such as applied voltage, pulse on time, pulse period, electrolyte concentration and electrode diameter on machining localization and surface roughness were analyzed. Finally, by using the optimized machining parameters, some 2D complex shapes and 3D square cavity structures with good shape precision and good surface quality were successfully obtained. It was proved that the micro electrochemical milling with nanosecond pulse technique is an effective machining method to fabricate metal microstructures.
Highlights
With the development of Micro-Electro-Mechanical Systems (MEMS), demand for micro components and products is growing rapidly in fields such as electronics, optics, healthcare, automotive, biological, communications, and avionics industries
A new method is introduced for fabricating micro metal parts with good shape precision and good surface quality, the conclusions can be summarized as follows:
Based on the transient reaction process of the electrochemical double layer, the mathematical model of micro electrochemical milling was established, which lays a theoretical foundation for the subsequent experiments
Summary
With the development of Micro-Electro-Mechanical Systems (MEMS), demand for micro components and products is growing rapidly in fields such as electronics, optics, healthcare, automotive, biological, communications, and avionics industries. MEMS integrated circuits such as amorphous silicon variable capacitor, micro resonators, and inverters are used in electronic communications and other fields To meet this demand, a variety of microfabrication methods such as micro-cutting technology, lithography, micro electrical discharge machining (micro-EDM), micro electrochemical discharge machining (micro-ECDM) developed rapidly [1,2], alongside many notable achievements [3,4,5,6]. In the field of energy and aerospace, the common materials cannot withstand the harsh working conditions such as high temperature and pressure, large mechanical stress, violent sliding contact, corrosion, and high-intensity radiation These miniature components need to be made with high-performance metals and alloys, and they relate to micro grooves, micro cavities, and other complex three-dimensional structures. This paper provides a basic technical support for the micro fabrication of the metal microstructure, which brings micro electrochemical milling technology closer to industrial application
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
