Abstract

Electrochemical Micro Machining (EMM) appears to be promising as a future micro machining technique since in many areas of applications; it offers several advantages including electronic, biomedical and MEMS/NEMS applications. Electrochemical Machining (ECM) can be effectively used in the micron range by maintaining very smaller inter electrode gap with proper controlling of predominant micromachining parameters during machining. Present paper will highlight the influence of various EMM process parameters i.e. machining voltage, electrolyte concentration, pulse period and duty cycle ratio on machining performance criteria e.g. material removal rate and machining accuracy to meet the micro machining requirements. Some of the experiments had been carried out on copper to investigate the most effective zone, which gives high machining accuracy with appreciable amount of material removal rate and optimum machining speed. From the experimental results, it has been observed that the introduction of short pulse period improves EMM performance characteristics. Attempt has also been made to study and compare the surface condition of the machined micro holes through SEM micrographs. From the analysis of test results and SEM micrographs it can be observed that optimum value of machining voltage is about 3V, pulse period is about 200 μsec, duty cycle ratio is about 20% and electrolyte concentration is about 20 g/l which will produce accurate micro holes with highest possible amount of material removal.

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