Abstract
Recently, there have been several reports on the observation of cavitation in microfluidics and in micropumps. Though cavitation is a common occurrence in micropumping, this is one of the least understood of all micropumping phenomena, and very limited progress has been made to study the behavior of cavitation in micropumps. Hence, a dedicated study on cavitation in micropumps and its effects on the performance of the micropump would be very useful. This work presents an experimental study on the behavior of cavitation in valveless micropump. The mechanism of cavitation occurrence in valveless micropumps has been explained by applying macroscale pumping principles to suit micropumping. The different stages of micropump cavitation have been defined through suitably conducted experiments and the results have been presented.
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