Abstract

The self-consistently generated current-free electric double layer (DL) is shown to scale up with the source tube diameter and appears not to be affected by rf driving frequency and changes in reactor geometry. This Letter presents the first simultaneous measurements of local plasma potential and beam energy as a function of axial position. The DL is shown to be no more than 5 mm thick (20 D lengths) and positioned just downstream of the maximum in the magnetic field gradient. Furthermore, its position relative to the magnetic field is observed to be invariant as the magnetic field is translated axially. Measurements of the potential drop across the DL are presented for pressures down to 0.09 mTorr and the DL strength (phiDL/T(e)) is determined to be between 5 and 7.

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