Abstract
A 2×2 arrayed microcolumn structure based on a monolithic deflector was evaluated experimentally. The microcolumns of this structure consist of electron emission tungsten tips, silicon membrane microlenses, double silicon deflectors, and Cu grid samples. The assembly of the microlens and column component was performed on a custom-built alignment unit consisting of an optical microscope, an alignment jig, and a motor-driven micromanipulator. The alignment of the tungsten tip and microlens hole is performed under direct observation with two perpendicularly aligned microscopes. Microlenses and deflectors (silicon octupoles) are mounted on a low temperature co-fired ceramic (LTCC) substrate. The three-dimensional interconnection structure of the LTCC substrate provides common wiring for each double octupole for synchronous operation. Each deflector was operated with same voltage sources. The 2×2 arrayed microcolumns were tested in three modes; single column, independent, and parallel mode, and the properties of these modes were compared.
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