Experimental detector chip for soft X-ray applications

Abstract

In this paper an experimental chip is presented, which is made of high-ohmic silicon, containing both nuclear radiation detectors and transistors. The detectors have a two-dimensional position resolution and were fabricated according to two different multiplexing principles. The first principle is the capacitor-resistor multiplexing technique, which is superior with respect to crosstalk. The second principle is the capacitor-interconnect technique, which is superior with respect to energy measurement. The transistors were fabricated and operated under the same circumstances as the detectors and performed well. The measured parameters ( g m C gs = MHz–8 GHz ) indicate that these transistors are well suited to preamplification and multiplexing purposes. The combination of the presented detectors and transistors for soft X-ray measurement is a very good one, because the limited spatial resolution allows enough chip area for the integration of readout electronics and, when backside illumination is applied, the transistors are shielded from direct irradiation. Therefore it is concluded that the detector matrices and the transistors presented in this paper are well suited to the construction of detector matrices with on-chip signal processing for soft X-ray applications.