Abstract
An experimental comparative analysis of series and parallel antennas was performed in an inductively coupled plasma. For the quantitative comparison of series and parallel antennas on the plasma generation, both antennas were made of copper tubes of the same length and thickness. The power transfer efficiency and the electron energy distribution function were measured. The experimental results show that the series antenna generates higher density plasma due to high coupling at the same applied powers (RF powers), while the parallel antenna generates higher density plasma due to low plasma potential (low ion energy losses) at the same absorbed powers. This provides practical information on plasma generation efficiency according to the antenna configuration of the ICP.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
