Abstract
The micro-bumps of metal films induced by ultrafast laser have potential applications in various fields, suchas biotechnology and energy, etc. The mechanism of micro-bump deformation of the gold film irradiated by single ultrafast laser pulse is controversial. In this study, the experimental research of single ultrafast laser pulse irradiating gold films with different thicknesses from 20 nm to 200 nm is carried out, with the laser fluence varying from 1 to 50 J/cm 2. The micro-bumps without melting are observed by the Scanning Electron Microscope (SEM) and different separation thresholds can be obtained. The separation threshold of gold films ranges from 5.1 to 43.5 J/cm 2 and it increases with the thickness of gold film increasing. The heights of micro-bumps are measured by Atomic Force Microscope (AFM). One-dimension (1D) Molecular dynamic (MD) simulations are carried out to analyze the temperature and stress evolutions. Large-scale two-dimension (2D) MD simulations are furthermore performed to obtain the micro-bump structure. MD simulations showing a good agreement with experiments, and the essential mechanism responsible for micro-bump without melting is clearly analyzed. It is also analyzed that the heights of micro-bumps are related to the laser fluences and radii of spot.
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