Abstract
In recent years, ultrafast laser processing metal film has attracted widespread attention for its possible application prospects in the fields of electronic information and biomedicine etc. Among them, nano-bump on metal film induced by single pulse laser has significant value in industry of new energy and biosensors etc. Experiments are carried out to explore the bump deformation induced by ultrafast laser in this study. The deformation and ablation crater of gold film induced by single ultrafast laser pulse are observed by Scanning Electron Microscope (SEM) and measured by Atomic Force Microscope (AFM). When laser fluence is lower than 0.35 J/cm<sup>2</sup>, there is no change on gold film exposed to ultrafast laser irradiation. Bump deformation happens when laser fluence exceeds 0.36 J/cm<sup>2</sup>, with some cracks appearing. The height of bump is increasing by the increase of laser fluence and the number of cracks is also increasing. Ultimately, some crack is extremely damaged and the hole is formed on the top of bump
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