Abstract

Selected area electron diffraction pattern (SADP) and transmission electron microscopy (TEM) measurements were carried out to investigate the ordered structures in lattice-mismatched InxGa1−xAs/InyAl1−yAs multiple quantum wells (MQWs). The SADP showed two sets of extra spots with asymmetrical intensity, and the high-resolution TEM image showed doublet periodicity in the contrast of the (001) lattice planes. The results of the SADP and the TEM measurements showed that a CuAu–I-type ordered structure was observed near the lattice-mismatched InxGa1−xAs/InyAl1−yAs heterointerfaces. This CuAu–I-type ordered structure had an antiphase boundary in the periodically regular InxGa1−xAs/InyAl1−yAs lattice-mismatched region. The existence of a CuAu–I-type ordered structure in InxGa1−xAs/InyAl1−yAs MQWs might originate from the lattice mismatch between the InxGa1−xAs and the InyAl1−yAs layers. These results provide important information on the microstructural properties for improving operating efficiencies in long-wavelength optoelectronic devices, such as strain compensated electroabsorption modulators utilizing lattice-mismatched InxGa1−xAs/InyAl1−yAs MQWs.

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