Abstract
Excimer laser micromachining by mask projection with half-tone masks has been used to define deep structures with complex surface profiles in cross-linked SU-8 photoresist. A simple algorithm has been developed to derive the required mask transmission function given the material etch characteristics and the desired surface profile. This algorithm has been shown to give reasonable profile accuracy for structures with heights of up to about 150 /spl mu/m. The technique has been used in the fabrication of the rotor blades for an axial-flow microturbine.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: IEE Proceedings - Science, Measurement and Technology
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
