Abstract
In this letter we report conditions for the reproducible, laser fabrication of microbumps on platinum thin films deposited on borosilicate glass substrates. Microbumps are formed as a result of irradiation of platinum thin film surfaces by a single pulse of 248nm radiation from a KrF excimer laser. Atomic force microscopy and scanning electron microscopy in conjunction with energy dispersive x-ray analysis were used to characterize these microbumps. A simple qualitative view of the mechanism of microbump formation based on laser heating and movement of melted borosilicate glass and platinum materials is discussed.
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