Abstract
High power excimer laser ablation projection tools have been used successfully in IBM manufacturing for about four years. One hundred fifty W XeCL, 300 mJ per pulse and 500 mJ per pulse lasers, running at 500 Hz and 300 Hz, respectively, have been run successfully for over 2 billion pulses. Excimer laser projection ablation tools are very similar to photo-expose tools, and their similarities and differences are explained. The laser and its gas handling, beam delivery, beam homogenization, optics, debris, part handling, and maintenance are discussed.
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