Abstract

Magnetic materials with a high self-biased ferromagnetic resonance (FMR) frequency and low electrical conductivity hold great potential for RF/microwave devices. In this work, ferrite film consisting of Fe3O4 (1.2 μm)/photoresist (60 nm)/Fe3O4 (1.2 μm) was deposited at 90 °C via spin spray deposition. Broadband impedance imaging with nanometer spatial resolution was recorded by using scanning microwave microscopy. Compared to a reference sample, it turned out that the grain boundary appeared to be more conductive than the grain.

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