Abstract

ABSTRACTBy contactless transient photoconductivity measurements it is shown that i a-Si:H films, both of standard quality films and annealed low temperature films, passivate the c-Si surface for electron-hole pairs generated in the c-Si substrate. Films deposited at low temperature without annealing do not lead to passivation of the c-Si surface. The injection of excess electrons from a standard a-Si:H film into c-Si with a time constant of a few microseconds and a rather high efficiency was observed. For an annealed 120°C a-Si:H film a slower and less efficient injection was measured, whereas an annealed 50°C a-Si:H shows no appreciable injection.

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