Abstract
AbstractIt is demonstrated in this paper that 1.9‐mm‐thick gallium nitride grown by Hydride Vapor Phase Epitaxy (HVPE) on an ammonothermally grown GaN seed can reproduce the structural, in terms of defects, properties of the seed. The etch pit density and its correlation to the threading dislocation density in the ammonothermal GaN substrate and the HVPE‐GaN layer is presented and analyzed. However, it has recently been observed that for HVPE‐GaN thicker than 2 mm some additional defects are formed in the new grown material. Therefore, three HVPE growth runs were performed in the same experimental conditions, using three structurally identical ammonothermally grown GaN seeds of different thicknesses. The influence of the thickness of the seeds on the crystallization process and the properties of the HVPE‐GaN layers is shown and discussed.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
