Abstract
In this work, we study ablation of silicon in distilled water under the action of laser pulses with nanosecond duration. The size distribution of produced particles depends on the laser processing parameters and therefore can be modified by the varying distance between laser pulses, laser fluence or pulse duration. The properties of fabricated nanostructures are investigated by scanning electron microscopy to acquire statistical information on nanoparticle sizes. These results can be promising for dielectric nanophotonics, photovoltaics or cancer treatment where relatively large spherical silicon particles are necessary.
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